文献检索/Journal of Loss Prevention in the Process IndustriesEM-T2Journal of Loss Prevention in the Process Industries2020-04-04第 65 卷，104127-104127Characterization and control of energetic deposits from hexachlorodisilane in process tool exhaust linesThanh-Trung NguyenNational Kaohsiung University of Science and TechnologyYu-Jhen LinNational Kaohsiung University of Science and TechnologyMo-Geng ChinNational Kaohsiung University of Science and TechnologyCheng-Chieh WangNational Kaohsiung University of Science and TechnologyHsiao‐Yun TsaiNational Kaohsiung University of Science and TechnologyJenq-Renn ChenNational Kaohsiung University of Science and TechnologyEugene Y. NgaiJennyfer ChaconGlobalFoundries (United States)Albert FranziGlobalFoundries (United States)Christian FifieldGlobalFoundries (United States)Jason BaylorGlobalFoundries (United States)John MarciGlobalFoundries (United States)Justin BitnerGlobalFoundries (United States)Kevin M. PrettymanGlobalFoundries (United States)Nicholas FerreraGlobalFoundries (United States)William JordonGlobalFoundries (United States)Trevor SzekeresGlobalFoundries (United States)去出版社页面 引用论文图谱收藏 被引提醒分享打印登录后看摘要和中文要点英文摘要、AI 生成的中文摘要和三条要点、参考文献和引证文献列表、论文图谱，注册免费。登录 / 注册关键词hexachlorodisilaneatomic layer depositionshock sensitivityalkaline dissolutionwaste disposal参考文献47引证文献1相似文献引文网络关联作者相关机构登录后可以看完整列表。去登录论文图谱本篇和它的参考文献、引证文献、相似文献登录后可以看这篇的论文图谱：谁被它引用、谁引用了它、还有哪些相似的研究。登录 / 注册
