文献检索/Computers & Industrial EngineeringEM-WoSComputers & Industrial Engineering2023-07-06第 182 卷，109421-109421高影响力 · 前 10%Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical studyChen–Fu ChienNational Tsing Hua UniversityTran Hong Van NguyenNational Tsing Hua UniversityYi-Chiu LiNational Tsing Hua UniversityYing‐Jen ChenNational Tsing Hua University去出版社页面 引用论文图谱收藏 被引提醒分享打印登录后看摘要和中文要点英文摘要、AI 生成的中文摘要和三条要点、参考文献和引证文献列表、论文图谱，注册免费。登录 / 注册关键词in-line metrologydefect detectionsampling strategy optimizationBayesian decision analysissemiconductor manufacturingwafer foundrysustainabilityresource allocationsampling frequencysampling intervalhigh-mix productionquality controlenergy consumptioncycle time reduction参考文献46引证文献7相似文献引文网络关联作者相关机构登录后可以看完整列表。去登录论文图谱本篇和它的参考文献、引证文献、相似文献登录后可以看这篇的论文图谱：谁被它引用、谁引用了它、还有哪些相似的研究。登录 / 注册
