文献检索/Computers & Industrial EngineeringEM-WoSComputers & Industrial Engineering2015-04-25第 85 卷，414-422高影响力 · 前 10%A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industriesMing LuoSingapore Institute of Manufacturing TechnologyHeng-Chao YanNational University of SingaporeBin HuNational University of SingaporeJunhong ZhouSingapore Institute of Manufacturing TechnologyChee Khiang PangNational University of Singapore去出版社页面 引用论文图谱收藏 被引提醒分享打印登录后看摘要和中文要点英文摘要、AI 生成的中文摘要和三条要点、参考文献和引证文献列表、论文图谱，注册免费。登录 / 注册关键词condition-based maintenancesemiconductor manufacturingwafer fabricationBP neural networkrestricted Boltzmann machinedeep belief networknon-stationary processesmaintenance scheduling参考文献34引证文献9相似文献引文网络关联作者相关机构登录后可以看完整列表。去登录论文图谱本篇和它的参考文献、引证文献、相似文献登录后可以看这篇的论文图谱：谁被它引用、谁引用了它、还有哪些相似的研究。登录 / 注册
